空間光変調器SLMの特徴：このタイプ空間光変調器SLM（Spatial light modulator）ビームを連続的に変調する必要がある場合に使用することができます。その応用の一つは**フォトリソグラフィマスク板に用いられる。
Data of one-megapixel SLM（1 M画素空間光変調器SLM指標は以下の通り）：
Parameter Value Remark
Matrix size 2048 × 512 mirrors
Pixel size 16 × 16 μm²
Frame rate 2 kHz
Mirror edge deflection 0 - 180 nm up to 350 nm possible
Wavelength 248 nm up to ca. 1500 nm possible
Average beam power 40 mW elevated power possible; wavelength dependent
Data voltage 0 - 25.5 V analogue
Data inputs 256

この金空間光変調器SLM微光電気機械システムを用いて構成されており、詳細な説明は以下を参照してください：
The devices are so called MOEMS (Micro Opto Electro Mechanical System). Micromirrors are fabricated with a pitch of >10 μm using thin film technology on top of a planarized CMOS backplane. The circuit provides electrodes underneath the mirrors to supply each mirror with individual voltages. The voltage difference between the electrode and the mirror generates an electrostatic force that deflects the mirror towards the electrode. The mirror material is a highly reflective
aluminium alloy. Mirrors made from alternative materials and coatings for high reflectivity for very demanding applications
are available or under development.